| Venting Channels Product Size(盲槽产品尺寸) | 参数详情 | 
|---|---|
| venting channels width size(槽宽尺寸精度) | ±5 μm | 
| venting channels depth size(槽深尺寸精度) | 150±30 μm (one example, @0.6mm T, 单面开槽) | 
| Double face venting channels Position tolerance(双面开槽对位精度) | ±25μm | 
| Position tolerance(位置度公差) | ≤ 5 μm |